Robert Vyne
21Patents
13h-index
32Co-inventors
81Inventor score
Filing activity: Apr 25, 1996 → Mar 14, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6053982A | Wafer support system | Electricity | 649 | Expired |
| US6093252A | Process chamber with inner support | Electricity | 540 | Expired |
| US6692576B2 | Wafer support system | Electricity | 517 | Expired |
| USD743357S1 | Susceptor | General | 470 | Active |
| US9299557B2 | Plasma pre-clean module and process | Electricity | 453 | Active |
| US9514927B2 | Plasma pre-clean module and process | Electricity | 450 | Active |
| US6126744A | Method and system for adjusting semiconductor processing equipment | Chemistry; Metallurgy | 389 | Expired |
| US6113702A | Wafer support system | Electricity | 52 | Expired |
| US6343183B1 | Wafer support system | Electricity | 49 | Expired |
| US6203622A | Wafer support system | Electricity | 45 | Expired |
| US7648579B2 | Substrate support system for reduced autodoping and backside deposition | Electricity | 30 | Expired |
| US6491757B2 | Wafer support system | Electricity | 19 | Expired |
| US6454866B1 | Wafer support system | Electricity | 18 | Expired |
| US8088225B2 | Substrate support system for reduced autodoping and backside deposition | Electricity | 13 | Active |
| US6464792B1 | Process chamber with downstream getter plate | Electricity | 6 | Expired |
| US10446393B2 | Methods for forming silicon-containing epitaxial layers and related semiconductor device structures | Electricity | 3 | Active |
| US7655093B2 | Wafer support system | Electricity | 2 | Active |
| US10501866B2 | Gas distribution apparatus for improved film uniformity in an epitaxial system | Chemistry; Metallurgy | 0 | Active |
| US12315722B2 | Method for making a radio frequency silicon-on-insulator (RFSOI) wafer including a superlattice | Electricity | 0 | Active |
| US11901179B2 | Method and device for depositing silicon onto substrates | Electricity | 0 | Active |
| US7186298B2 | Wafer support system | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.