Inventor · Antigo, WI, US

Roger A. Olson

16Patents
11h-index
8Co-inventors
61Inventor score

Filing activity: Apr 24, 1989 → Nov 22, 2006

Most-cited inventions

PatentTitleAreaCited byStatus
US5538758A Method and apparatus for the deposition of parylene AF4 onto semiconductor wafers Chemistry; Metallurgy 82 Expired
US5709753A Parylene deposition apparatus including a heated and cooled dimer crucible Chemistry; Metallurgy 67 Expired
US5536317A Parylene deposition apparatus including a quartz crystal thickness/rate controller Chemistry; Metallurgy 61 Expired
US5534068A Parylene deposition apparatus including a tapered deposition chamber and dual vacuum outlet pumping arrangement Chemistry; Metallurgy 54 Expired
US5879808A Parylene polymer layers Emerging Cross-Sectional Technologies 47 Expired
US5556473A Parylene deposition apparatus including dry vacuum pump system and downstream cold trap Chemistry; Metallurgy 38 Expired
US5536322A Parylene deposition apparatus including a heated and cooled support platen and an electrostatic clamping device Chemistry; Metallurgy 27 Expired
US5536319A Parylene deposition apparatus including an atmospheric shroud and inert gas source Chemistry; Metallurgy 26 Expired
US5424097A Continuous vapor deposition apparatus Performing Operations; Transporting 25 Expired
US5201956A Cellular tumble coater Chemistry; Metallurgy 20 Expired
US6051276A Internally heated pyrolysis zone Chemistry; Metallurgy 13 Expired
US5908506A Continuous vapor deposition apparatus Performing Operations; Transporting 10 Expired
US5806319A Method and apparatus for cryogenically cooling a deposition chamber Emerging Cross-Sectional Technologies 8 Expired
US4967595A Aviation fuel sample tester Physics 6 Expired
US7600480B2 Tree spade for ATV Human Necessities 2 Active
US5312489A Rotary fixture for vapor deposition coating apparatus Chemistry; Metallurgy 2 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.