Inventor · Grenoble, FR

Serdar Manakli

9Patents
2h-index
10Co-inventors
44Inventor score

Filing activity: Jul 9, 2002 → Oct 5, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US6807662B2 Performance of integrated circuit components via a multiple exposure technique Physics 35 Expired
US8713499B2 Electron-beam lithography method with correction of line ends by insertion of contrast patterns Electricity 4 Active
US9607808B2 Method of electron-beam lithography with correction of corner roundings Electricity 1 Active
US9891519B2 Free form fracturing method for electronic or optical lithography using resist threshold control Electricity 0 Active
US9250540B2 Lithography method with combined optimization of radiated energy and design geometry Electricity 0 Active
US7897308B2 Method for transferring a predetermined pattern reducing proximity effects Emerging Cross-Sectional Technologies 0 Active
US7955914B2 Method of producing an asymmetric architecture semi-conductor device Electricity 0 Active
US10197909B2 Method of reducing shot count in direct writing by a particle or photon beam Electricity 0 Active
US9235132B2 Large-mesh cell-projection electron-beam lithography method Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.