Shingo Okubo
7Patents
3h-index
8Co-inventors
42Inventor score
Filing activity: May 29, 2009 → Dec 28, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8236381B2 | Metal piperidinate and metal pyridinate precursors for thin film deposition | Chemistry; Metallurgy | 14 | Active |
| US8636845B2 | Metal heterocyclic compounds for deposition of thin films | Emerging Cross-Sectional Technologies | 4 | Active |
| US9343290B2 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Electricity | 3 | Active |
| US9109281B2 | Metal heterocyclic compounds for deposition of thin films | Emerging Cross-Sectional Technologies | 3 | Active |
| US8101237B2 | Tellurium precursors for film deposition | Chemistry; Metallurgy | 3 | Active |
| US9633838B2 | Vapor deposition of silicon-containing films using penta-substituted disilanes | Electricity | 2 | Active |
| US9548198B2 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Electricity | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.