Shu Nakajima
24Patents
7h-index
14Co-inventors
66Inventor score
Filing activity: Jun 24, 1987 → Jul 25, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6483690B1 | Ceramic electrostatic chuck assembly and method of making | Electricity | 99 | Expired |
| US4786359A | Xenon enhanced plasma etch | Electricity | 75 | Expired |
| US6452775B1 | Electrostatic chuck and method for manufacturing the same | Emerging Cross-Sectional Technologies | 33 | Expired |
| US6422173B1 | Apparatus and methods for actively controlling RF peak-to-peak voltage in an inductively coupled plasma etching system | Electricity | 16 | Expired |
| US6531030B1 | Inductively coupled plasma etching apparatus | Electricity | 12 | Expired |
| US6992876B1 | Electrostatic chuck and its manufacturing method | Emerging Cross-Sectional Technologies | 12 | Expired |
| US7004181B2 | Apparatus for cleaning a substrate | Emerging Cross-Sectional Technologies | 7 | Expired |
| US8216421B2 | Plasma stabilization method and plasma apparatus | Electricity | 4 | Active |
| US7288156B2 | Methods for cleaning a substrate | Emerging Cross-Sectional Technologies | 3 | Expired |
| US7320941B2 | Plasma stabilization method and plasma apparatus | Electricity | 3 | Expired |
| US6173841A | Film cartridge sorting device for use with photographic film processor | Emerging Cross-Sectional Technologies | 1 | Expired |
| US8691048B2 | Plasma stabilization method and plasma apparatus | Electricity | 1 | Active |
| US12263734B2 | Vehicle input device, vehicle input method, and non-transitory storage medium stored with vehicle input program | Performing Operations; Transporting | 0 | Active |
| US12321565B2 | Display control device, display control method and display control program | Performing Operations; Transporting | 0 | Active |
| US6368452B1 | Plasma treatment apparatus and method of semiconductor processing | Electricity | 0 | Expired |
| US9824863B2 | Plasma stabilization method and plasma apparatus | Electricity | 0 | Active |
| US11787289B2 | Vehicle input device, vehicle input method, and non-transitory storage medium stored with vehicle input program | Performing Operations; Transporting | 0 | Active |
| US11928288B2 | Operation input device, operation input method, and non-transitory computer-readable medium storing operation input program | Physics | 0 | Active |
| US11393469B2 | Vehicle-mounted device operation system | Physics | 0 | Active |
| US11630539B2 | Input accepting device, input accepting method, and non-transitory storage medium | Performing Operations; Transporting | 0 | Active |
| US12097763B2 | Vehicle operation input device, vehicle operation input method, non-transitory recording medium | Electricity | 0 | Active |
| US12045436B2 | Display control device for vehicle, display method for vehicle, and non-transitory recording medium for vehicle | Physics | 0 | Active |
| US12227072B2 | Display control device for vehicle, display method for vehicle, and storage medium | Performing Operations; Transporting | 0 | Active |
| US12165642B2 | Vehicle-mounted device operation system | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.