Su-Chen Lai
13Patents
6h-index
17Co-inventors
55Inventor score
Filing activity: Dec 8, 2003 → Jun 29, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7923321B2 | Method for gap filling in a gate last process | Electricity | 60 | Active |
| US7977181B2 | Method for gate height control in a gate last process | Electricity | 27 | Active |
| US7985690B2 | Method for a gate last process | Electricity | 12 | Active |
| US7981801B2 | Chemical mechanical polishing (CMP) method for gate last process | Emerging Cross-Sectional Technologies | 10 | Active |
| US8349680B2 | High-k metal gate CMOS patterning method | Electricity | 9 | Active |
| US8237227B2 | Dummy gate structure for gate last process | Electricity | 7 | Active |
| US8530326B2 | Method of fabricating a dummy gate structure in a gate last process | Electricity | 5 | Active |
| US8390072B2 | Chemical mechanical polishing (CMP) method for gate last process | Emerging Cross-Sectional Technologies | 5 | Active |
| US6881620B1 | Method of fabricating deep trench capacitor | Electricity | 5 | Expired |
| US7808019B2 | Gate structure | Electricity | 3 | Active |
| US7459383B2 | Fabricating method of gate structure | Electricity | 2 | Active |
| US7026210B2 | Method for forming a bottle-shaped trench | Electricity | 0 | Expired |
| US9054025B2 | Process for controlling shallow trench isolation step height | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.