Sultan Malik
14Patents
6h-index
17Co-inventors
55Inventor score
Filing activity: Feb 3, 2015 → Jul 10, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9728437B2 | High temperature chuck for plasma processing systems | Electricity | 117 | Active |
| US10179941B1 | Gas delivery system for high pressure processing chamber | Electricity | 27 | Active |
| US10675581B2 | Gas abatement apparatus | Performing Operations; Transporting | 18 | Active |
| US10224224B2 | High pressure wafer processing systems and related methods | Electricity | 17 | Active |
| US10529603B2 | High pressure wafer processing systems and related methods | Electricity | 17 | Active |
| US10748783B2 | Gas delivery module | Electricity | 16 | Active |
| US10704141B2 | In-situ CVD and ALD coating of chamber to control metal contamination | Electricity | 6 | Active |
| US11110383B2 | Gas abatement apparatus | Performing Operations; Transporting | 0 | Active |
| US10468285B2 | High temperature chuck for plasma processing systems | Electricity | 0 | Active |
| USD941787S1 | Substrate transfer blade | General | 0 | Active |
| US11948828B2 | Pin-less substrate transfer apparatus and method for a processing chamber | Electricity | 0 | Active |
| US12198951B2 | High pressure wafer processing systems and related methods | Electricity | 0 | Active |
| US11749555B2 | Semiconductor processing system | Electricity | 0 | Active |
| US11361978B2 | Gas delivery module | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.