Sung-min Huh
10Patents
3h-index
16Co-inventors
46Inventor score
Filing activity: Nov 8, 2004 → Sep 26, 2008
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7563547B2 | Photomask and method of manufacturing the same | Physics | 10 | Active |
| US7389491B2 | Methods, systems and computer program products for correcting photomask using aerial images and boundary regions | Physics | 3 | Active |
| US7927767B2 | Reflective photomasks and methods of determining layer thicknesses of the same | Physics | 3 | Active |
| US7642017B2 | Reflective photomask, method of fabricating the same, and reflective blank photomask | Emerging Cross-Sectional Technologies | 3 | Active |
| US7745072B2 | Method of correcting critical dimension in photomask and photomask having corrected critical dimension using the method | Physics | 3 | Active |
| US7601467B2 | Method of manufacturing EUVL alternating phase-shift mask | Physics | 2 | Active |
| US7745068B2 | Binary photomask having a compensation layer | Physics | 1 | Active |
| US7855034B2 | Reflecting mask, apparatus for fixing the reflecting mask and method of fixing the reflecting mask | Physics | 0 | Active |
| US7754398B2 | Photo mask having assist pattern and method of fabricating the same | Physics | 0 | Active |
| US8072679B2 | Microscope and method of providing image data using the same | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.