Tamotsu Abe
49Patents
7h-index
35Co-inventors
69Inventor score
Filing activity: Jul 18, 1985 → May 4, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7999241B2 | Extreme ultraviolet light source apparatus | Electricity | 26 | Active |
| US7923705B2 | Extreme ultra violet light source apparatus | Electricity | 21 | Active |
| US7880153B2 | Extreme ultra violet light source apparatus | Physics | 12 | Active |
| US8558202B2 | Extreme ultraviolet light source apparatus | Electricity | 10 | Active |
| US8256441B2 | Method for cleaning optical element of EUV light source device and optical element cleaning device | Physics | 9 | Active |
| US8436328B2 | Extreme ultraviolet light source apparatus | Electricity | 9 | Active |
| US8000361B2 | Laser system | Electricity | 8 | Active |
| US8624208B2 | Extreme ultraviolet light generation system | Physics | 7 | Active |
| US8507883B2 | Extreme ultraviolet light source apparatus | Electricity | 7 | Active |
| US8536551B2 | Extreme ultra violet light source apparatus | Electricity | 7 | Active |
| US8872142B2 | Extreme ultraviolet light generation apparatus | Physics | 7 | Active |
| US8003962B2 | Extreme ultraviolet light source apparatus and nozzle protection device | Electricity | 6 | Active |
| US8536550B2 | Method and apparatus for cleaning collector mirror in EUV light generator | Performing Operations; Transporting | 6 | Active |
| US8173984B2 | Extreme ultraviolet light source apparatus | Electricity | 6 | Active |
| US8212228B2 | Extreme ultra violet light source apparatus | Physics | 5 | Active |
| US8492738B2 | Apparatus for and method of withdrawing ions in EUV light production apparatus | Physics | 5 | Active |
| US9731848B2 | Bread conveying apparatus | Performing Operations; Transporting | 5 | Active |
| US7732794B2 | Extreme ultra violet light source apparatus | Electricity | 4 | Active |
| US8569723B2 | Extreme ultraviolet light source apparatus | Electricity | 4 | Active |
| US8629417B2 | Extreme ultraviolet light generation apparatus | Electricity | 4 | Active |
| US7842937B2 | Extreme ultra violet light source apparatus | Electricity | 4 | Active |
| US10102938B2 | Extreme ultraviolet light generating apparatus | Electricity | 4 | Active |
| US10172225B2 | Extreme ultraviolet light generation apparatus | Electricity | 4 | Active |
| US8288743B2 | Apparatus for and method of withdrawing ions in EUV light production apparatus | Physics | 3 | Active |
| US8698112B2 | Extreme ultraviolet light generation apparatus | Electricity | 3 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.