Tomoo Kato
11Patents
3h-index
23Co-inventors
56Inventor score
Filing activity: Jun 8, 1999 → Feb 3, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6208909A | Wafer transport device | Emerging Cross-Sectional Technologies | 13 | Expired |
| US7857985B2 | Metal-polishing liquid and chemical mechanical polishing method using the same | Electricity | 11 | Active |
| US6241456A | Wafer inspecting apparatus and method | Emerging Cross-Sectional Technologies | 8 | Expired |
| US9202709B2 | Polishing liquid for metal and polishing method using the same | Chemistry; Metallurgy | 2 | Active |
| US9726978B2 | Cleaning composition, cleaning process, and process for producing semiconductor device | Electricity | 1 | Active |
| US6309166A | Wafer transfer device | Emerging Cross-Sectional Technologies | 1 | Expired |
| US9068153B2 | Cleaning composition, cleaning process, and process for producing semiconductor device | Chemistry; Metallurgy | 1 | Active |
| US8202445B2 | Metal polishing composition and chemical mechanical polishing method | Chemistry; Metallurgy | 0 | Active |
| US11043695B2 | Lithium-containing composite oxide, cathode active material, positive electrode for lithium ion secondary battery, and lithium ion secondary battery | Emerging Cross-Sectional Technologies | 0 | Active |
| US6780344B2 | Garnet ferrite for low-insertion-loss non-reciprocal circuit, method for preparing the same, and non-reciprocal circuit device including the same | Chemistry; Metallurgy | 0 | Expired |
| US10074851B2 | Surface modified lithium-containing composite oxide particles, positive electrode using the particles, and non-aqueous electrolyte secondary battery | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.