Toru Kitada
8Patents
2h-index
22Co-inventors
47Inventor score
Filing activity: Aug 24, 2005 → Jun 29, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9790590B2 | Vacuum-processing apparatus, vacuum-processing method, and storage medium | Electricity | 2 | Active |
| US8968538B2 | Sputtering device and sputtering method | Electricity | 2 | Active |
| US8906208B2 | Sputtering apparatus, sputtering method, and electronic device manufacturing method | Electricity | 2 | Active |
| US7731825B2 | Manufacturing apparatus of magnetoresistance elements | Electricity | 1 | Active |
| US10309005B2 | Deposition device and deposition method | Electricity | 1 | Active |
| US12387922B2 | Film forming apparatus, processing condition determination method, and film forming method | Electricity | 0 | Active |
| US11894222B2 | Film forming apparatus and film forming method | Electricity | 0 | Active |
| US12018928B2 | Film thickness measurement method, film thickness measurement device, and film formation system | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.