Inventor · Espoo, FI

Wei Li

71Patents
11h-index
159Co-inventors
81Inventor score

Filing activity: Jun 3, 2002 → Mar 23, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US6820570B2 Atomic layer deposition reactor Chemistry; Metallurgy 581 Expired
US7410666B2 Metal nitride carbide deposition by ALD Emerging Cross-Sectional Technologies 479 Active
US6986914B2 Metal nitride deposition by ALD with reduction pulse Emerging Cross-Sectional Technologies 456 Expired
US9868131B2 Atomic layer deposition with plasma source Electricity 397 Active
US9095869B2 Atomic layer deposition with plasma source Electricity 340 Active
US6955986B2 Atomic layer deposition methods for forming a multi-layer adhesion-barrier layer for integrated circuits Electricity 74 Expired
US7419903B2 Thin films Electricity 73 Expired
US7638170B2 Low resistivity metal carbonitride thin film deposition by atomic layer deposition Chemistry; Metallurgy 67 Active
US8320628B2 Method and system for assisting driver Physics 43 Active
US8993055B2 Enhanced thin film deposition Electricity 24 Active
US9831094B2 Enhanced thin film deposition Electricity 12 Active
US7981791B2 Thin films Electricity 8 Active
US8102058B2 Chip package structure and method for fabricating the same Electricity 7 Active
US7920070B2 Parking guidance device and method thereof Performing Operations; Transporting 7 Active
US6811610B2 Method of making enhanced CVD diamond Emerging Cross-Sectional Technologies 7 Expired
US7778774B2 Portable telematics device Physics 6 Active
USRE41189E1 Method of making enhanced CVD diamond General 4 Active
US9704897B1 Display panel and method of preparing the same, display device Physics 3 Active
US9904398B2 Pressure detection unit, pressure detection method and display panel Electricity 3 Active
US8681283B2 Method and resulting capacitor structure for liquid crystal on silicon display devices Electricity 2 Active
US11469078B2 Optical system for monitoring plasma reactions and reactors Emerging Cross-Sectional Technologies 2 Active
US10262597B2 Pixel circuit and driving method thereof, array substrate and display apparatus Physics 2 Active
US9564339B2 Etch resistant alumina based coatings Electricity 2 Active
US8339553B2 Method and structure for top metal formation of liquid crystal on silicon devices Electricity 2 Active
US10297444B2 Enhanced thin film deposition Electricity 2 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.