Wei Wang
69Patents
22h-index
112Co-inventors
91Inventor score
Filing activity: Jun 7, 1995 → Feb 23, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7942969B2 | Substrate cleaning chamber and components | Emerging Cross-Sectional Technologies | 466 | Active |
| US7396480B2 | Method for front end of line fabrication | Electricity | 265 | Active |
| US7604708B2 | Cleaning of native oxide with hydrogen-containing radicals | Electricity | 212 | Expired |
| US8846163B2 | Method for removing oxides | Electricity | 187 | Active |
| US7520957B2 | Lid assembly for front end of line fabrication | Electricity | 154 | Expired |
| US6751563B2 | Electronic power meter | Physics | 131 | Expired |
| US7304586B2 | On-line web accessed energy meter | Emerging Cross-Sectional Technologies | 86 | Expired |
| US8190381B2 | Intelligent electronic device with enhanced power quality monitoring and communications capabilities | Physics | 74 | Active |
| US7480129B2 | Detachable electrostatic chuck for supporting a substrate in a process chamber | Emerging Cross-Sectional Technologies | 66 | Expired |
| US6143140A | Method and apparatus to improve the side wall and bottom coverage in IMP process by using magnetic field | Electricity | 59 | Expired |
| US7616656B2 | System and method for providing communication between intelligent electronic devices via an open channel | Emerging Cross-Sectional Technologies | 54 | Expired |
| US8160824B2 | Intelligent electronic device with enhanced power quality monitoring and communication capabilities | Physics | 54 | Active |
| US5766379A | Passivated copper conductive layers for microelectronic applications and methods of manufacturing same | Electricity | 44 | Expired |
| US8700347B2 | Intelligent electronic device with enhanced power quality monitoring and communications capability | Physics | 42 | Active |
| US7999696B2 | On-line web accessed energy meter | Emerging Cross-Sectional Technologies | 39 | Active |
| US9080894B2 | Intelligent electronic device for receiving and sending data at high speeds over a network | Emerging Cross-Sectional Technologies | 36 | Active |
| US8599036B2 | On-line web accessed energy meter | Emerging Cross-Sectional Technologies | 34 | Active |
| US8933815B2 | Intelligent electronic device having an XML-based graphical interface | Emerging Cross-Sectional Technologies | 33 | Active |
| US7697260B2 | Detachable electrostatic chuck | Emerging Cross-Sectional Technologies | 27 | Expired |
| US6461483B1 | Method and apparatus for performing high pressure physical vapor deposition | Electricity | 26 | Expired |
| US8666688B2 | High speed digital transient waveform detection system and method for use in an intelligent electronic device | Physics | 26 | Active |
| US6057223A | Passivated copper conductive layers for microelectronic applications | Electricity | 23 | Expired |
| US7244344B2 | Physical vapor deposition plasma reactor with VHF source power applied through the workpiece | Electricity | 21 | Expired |
| US7767024B2 | Method for front end of line fabrication | Electricity | 20 | Active |
| US8107491B2 | System and method for providing communication between intelligent electronic devices via an open channel | Emerging Cross-Sectional Technologies | 20 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.