Inventor · Santa Clara, CA, US

Wei Wang

69Patents
22h-index
112Co-inventors
91Inventor score

Filing activity: Jun 7, 1995 → Feb 23, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US7942969B2 Substrate cleaning chamber and components Emerging Cross-Sectional Technologies 466 Active
US7396480B2 Method for front end of line fabrication Electricity 265 Active
US7604708B2 Cleaning of native oxide with hydrogen-containing radicals Electricity 212 Expired
US8846163B2 Method for removing oxides Electricity 187 Active
US7520957B2 Lid assembly for front end of line fabrication Electricity 154 Expired
US6751563B2 Electronic power meter Physics 131 Expired
US7304586B2 On-line web accessed energy meter Emerging Cross-Sectional Technologies 86 Expired
US8190381B2 Intelligent electronic device with enhanced power quality monitoring and communications capabilities Physics 74 Active
US7480129B2 Detachable electrostatic chuck for supporting a substrate in a process chamber Emerging Cross-Sectional Technologies 66 Expired
US6143140A Method and apparatus to improve the side wall and bottom coverage in IMP process by using magnetic field Electricity 59 Expired
US7616656B2 System and method for providing communication between intelligent electronic devices via an open channel Emerging Cross-Sectional Technologies 54 Expired
US8160824B2 Intelligent electronic device with enhanced power quality monitoring and communication capabilities Physics 54 Active
US5766379A Passivated copper conductive layers for microelectronic applications and methods of manufacturing same Electricity 44 Expired
US8700347B2 Intelligent electronic device with enhanced power quality monitoring and communications capability Physics 42 Active
US7999696B2 On-line web accessed energy meter Emerging Cross-Sectional Technologies 39 Active
US9080894B2 Intelligent electronic device for receiving and sending data at high speeds over a network Emerging Cross-Sectional Technologies 36 Active
US8599036B2 On-line web accessed energy meter Emerging Cross-Sectional Technologies 34 Active
US8933815B2 Intelligent electronic device having an XML-based graphical interface Emerging Cross-Sectional Technologies 33 Active
US7697260B2 Detachable electrostatic chuck Emerging Cross-Sectional Technologies 27 Expired
US6461483B1 Method and apparatus for performing high pressure physical vapor deposition Electricity 26 Expired
US8666688B2 High speed digital transient waveform detection system and method for use in an intelligent electronic device Physics 26 Active
US6057223A Passivated copper conductive layers for microelectronic applications Electricity 23 Expired
US7244344B2 Physical vapor deposition plasma reactor with VHF source power applied through the workpiece Electricity 21 Expired
US7767024B2 Method for front end of line fabrication Electricity 20 Active
US8107491B2 System and method for providing communication between intelligent electronic devices via an open channel Emerging Cross-Sectional Technologies 20 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.