Inventor · San Jose, CA, US

Weifeng YE

10Patents
3h-index
28Co-inventors
52Inventor score

Filing activity: May 10, 2011 → Dec 31, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US9105695B2 Cobalt selectivity improvement in selective cobalt process sequence Electricity 5 Active
US10043709B2 Methods for thermally forming a selective cobalt layer Electricity 4 Active
US8758638B2 Copper oxide removal techniques Electricity 3 Active
US9580801B2 Enhancing electrical property and UV compatibility of ultrathin blok barrier film Electricity 3 Active
US10109520B2 Methods for depositing dielectric barrier layers and aluminum containing etch stop layers Electricity 2 Active
US9633861B2 Cu/barrier interface enhancement Electricity 2 Active
US9478460B2 Cobalt selectivity improvement in selective cobalt process sequence Electricity 1 Active
US10546742B2 Method to reduce trap-induced capacitance in interconnect dielectric barrier stack Electricity 0 Active
US10707122B2 Methods for depositing dielectric barrier layers and aluminum containing etch stop layers Electricity 0 Active
US10170299B2 Method to reduce trap-induced capacitance in interconnect dielectric barrier stack Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.