Inventor · San Ramon, CA, US

Xiaolin Chen

35Patents
8h-index
67Co-inventors
78Inventor score

Filing activity: May 13, 1996 → Aug 18, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US7109114B2 HDP-CVD seasoning process for high power HDP-CVD gapfil to improve particle performance Emerging Cross-Sectional Technologies 488 Expired
US8450191B2 Polysilicon films by HDP-CVD Electricity 455 Active
US6908862B2 HDP-CVD dep/etch/dep process for improved deposition into high aspect ratio features Emerging Cross-Sectional Technologies 257 Expired
US7081414B2 Deposition-selective etch-deposition process for dielectric film gapfill Electricity 86 Expired
US8563445B2 Conformal layers by radical-component CVD Electricity 42 Active
US7902080B2 Deposition-plasma cure cycle process to enhance film quality of silicon dioxide Electricity 39 Active
US5822219A System for identifying materials by NIR spectrometry Physics 36 Expired
US7465680B2 Post deposition plasma treatment to increase tensile stress of HDP-CVD SIO2 Electricity 24 Expired
US8629067B2 Dielectric film growth with radicals produced using flexible nitrogen/hydrogen ratio Electricity 7 Active
US8889566B2 Low cost flowable dielectric films Electricity 5 Active
US11010522B2 Efficient mechanism for interactive fault analysis in formal verification environment Physics 4 Active
US7745351B2 Post deposition plasma treatment to increase tensile stress of HDP-CVD SIO2 Electricity 3 Active
US11062921B1 Systems and methods for aluminum-containing film removal Electricity 2 Active
US7799698B2 Deposition-selective etch-deposition process for dielectric film gapfill Electricity 2 Active
US7691753B2 Deposition-selective etch-deposition process for dielectric film gapfill Electricity 2 Active
USD984611S1 Facial mask heater General 2 Active
US11382461B2 Bean grinding device and bean grinding coffee machine Human Necessities 2 Active
US8433204B2 DQPSK demodulator Electricity 2 Active
US9404178B2 Surface treatment and deposition for reduced outgassing Chemistry; Metallurgy 2 Active
US9575255B2 Wavelength division multiplexer array Electricity 1 Active
US8786938B2 DP-QPSK demodulator Electricity 1 Active
US10433669B2 Bean grinder and automatic coffee pot equipped with the same Human Necessities 0 Active
US11859071B2 Cut resistant and creep resistant UHMWPE fiber and preparation method thereof Chemistry; Metallurgy 0 Active
US11631589B2 Metal etch in high aspect-ratio features Electricity 0 Active
US12087595B2 Metal deposition and etch in high aspect-ratio features Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.