Inventor · Zhejiang, CN

Yi Yang

63Patents
4h-index
31Co-inventors
62Inventor score

Filing activity: Apr 22, 2013 → Nov 28, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US10134981B1 Free layer sidewall oxidation and spacer assisted magnetic tunnel junction (MTJ) etch for high performance magnetoresistive random access memory (MRAM) devices Electricity 9 Active
US10388862B1 Highly selective ion beam etch hard mask for sub 60nm MRAM devices Electricity 7 Active
US10418547B1 Sub 60nm etchless MRAM devices by ion beam etching fabricated T-shaped bottom electrode Electricity 6 Active
US9871195B1 Spacer assisted ion beam etching of spin torque magnetic random access memory Electricity 4 Active
US10714679B2 CMP stop layer and sacrifice layer for high yield small size MRAM devices Electricity 4 Active
US10522741B1 Under-cut via electrode for sub 60nm etchless MRAM devices by decoupling the via etch process Performing Operations; Transporting 3 Active
US10522753B2 Highly selective ion beam etch hard mask for sub 60nm MRAM devices Electricity 3 Active
US11024797B2 Under-cut via electrode for sub 60 nm etchless MRAM devices by decoupling the via etch process Performing Operations; Transporting 3 Active
US10516102B1 Multiple spacer assisted physical etching of sub 60nm MRAM devices Electricity 3 Active
US10475991B2 Fabrication of large height top metal electrode for sub-60nm magnetoresistive random access memory (MRAM) devices Electricity 2 Active
US10522751B2 MTJ CD variation by HM trimming Electricity 2 Active
US10770654B2 Multiple spacer assisted physical etching of sub 60nm MRAM devices Electricity 2 Active
US11375782B2 Outdoor umbrella frame having telescopic structure Human Necessities 2 Active
US10964887B2 Highly physical ion resistive spacer to define chemical damage free sub 60nm MRAM devices Electricity 2 Active
US11043632B2 Ion beam etching process design to minimize sidewall re-deposition Electricity 2 Active
US11800811B2 MTJ CD variation by HM trimming Electricity 2 Active
US11444241B2 Self-aligned encapsulation hard mask to separate physically under-etched MTJ cells to reduce conductive R-deposition Electricity 1 Active
US11527711B2 MTJ device performance by controlling device shape Electricity 1 Active
US10714680B2 Large height tree-like sub 30nm vias to reduce conductive material re-deposition for sub 60nm MRAM devices Electricity 1 Active
US10886461B2 Highly physical etch resistive photoresist mask to define large height sub 30nm via and metal hard mask for MRAM devices Electricity 1 Active
US11088320B2 Fabrication of large height top metal electrode for sub-60nm magnetoresistive random access memory (MRAM) devices Electricity 1 Active
US9482445B2 Heat pump water heater with heat utilization balance processor and heat utilization balance processor thereof Emerging Cross-Sectional Technologies 1 Active
US11818961B2 Self-aligned encapsulation hard mask to separate physically under-etched MTJ cells to reduce conductive re-deposition Electricity 1 Active
US11121314B2 Large height tree-like sub 30nm vias to reduce conductive material re-deposition for sub 60nm MRAM devices Electricity 1 Active
US10921707B2 Self-adaptive halogen treatment to improve photoresist pattern and magnetoresistive random access memory (MRAM) device uniformity Electricity 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.