Yoko Takebe
17Patents
6h-index
15Co-inventors
59Inventor score
Filing activity: Dec 12, 2002 → Jan 29, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6818258B2 | Resist composition | Emerging Cross-Sectional Technologies | 50 | Expired |
| US6916590B2 | Resist composition | Emerging Cross-Sectional Technologies | 41 | Expired |
| US7244545B2 | Fluorinated compound, fluoropolymer and process for its production | Emerging Cross-Sectional Technologies | 13 | Expired |
| US6858692B2 | Fluorinated compound, fluoropolymer and process for its production | Chemistry; Metallurgy | 9 | Expired |
| US6815146B2 | Resist composition | Emerging Cross-Sectional Technologies | 8 | Expired |
| US6733952B2 | Resist composition | Emerging Cross-Sectional Technologies | 6 | Expired |
| US7015366B2 | Fluorinated compound, fluoropolymer and process for its production | Chemistry; Metallurgy | 4 | Expired |
| US7091294B2 | Fluoropolymer and resist composition | Chemistry; Metallurgy | 3 | Expired |
| US8178983B2 | Water repellant composition for substrate to be exposed, method for forming resist pattern, electronic device produced by the formation method, treatment method for imparting water repellency to substrate to be exposed, water repellant set for substrate to be exposed, and treatment method for imparting water repellency to substrate to be exposed using the same | Physics | 2 | Active |
| US7550545B2 | Fluorinated compound, and fluoropolymer, process for its production and resist composition containing it | Emerging Cross-Sectional Technologies | 2 | Active |
| US6984704B2 | Fluorinated compound, fluoropolymer and process for its production | Chemistry; Metallurgy | 2 | Expired |
| US7026416B2 | Fluoropolymer | Chemistry; Metallurgy | 1 | Expired |
| US8236901B2 | Fluorinated compound, fluoropolymer and method for producing the compound | Emerging Cross-Sectional Technologies | 0 | Active |
| US9223200B2 | Pellicle for lithography, pellicle-mounted photomask, and exposure treatment method | Physics | 0 | Active |
| US8134033B2 | Fluorocompound having highly fluorinated norbornane structure, fluoropolymer, and their production processes | Chemistry; Metallurgy | 0 | Active |
| US7498393B2 | Fluorinated compound, fluoropolymer, resist composition, and composition for resist protective film | Emerging Cross-Sectional Technologies | 0 | Active |
| US7825275B2 | Fluorinated compound, fluoropolymer and method for producing the compound | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.