Patent · US Active

IC with test structures and E-beam pads embedded within a contiguous standard cell area

US10978438B1 · kind B1 · utility

4Cited by

161References

14Claims

0Family size

Assignee

PDF SOLUTIONS, INC. · US

Inventors

Stephen Lam · Merced, US
Dennis Ciplickas · San Jose, US
Tomasz Brozek · معلمی نژاد, US
Jeremy Cheng · San Jose, US
Simone Comensoli · Gandino, IT
Indranil De · Alameda, US
Kelvin Doong · Hsinchu, TW
Hans Eisenmann · Tutzing, DE
Timothy Fiscus · Beaver, US
Jonathan Haigh · Pittsburgh, US
Christopher Hess · Belmont, US
John Kibarian · Los Altos Hills, US
Sherry Lee · San Jose, US
Marci Liao · Santa Clara, US
Sheng-Che Lin · Hsinchu, TW
Hideki Matsuhashi · Santa Clara, US
Kimon Michaels · Monte Sereno, US
Conor O'Sullivan · Campbell, US
Markus Rauscher · Munich, DE
Vyacheslav Rovner · Pittsburgh, US
Andrzej Strojwas · Pittsburgh, US
Marcin Strojwas · Pittsburgh, US
Carl Taylor · Pittsburgh, US
Rakesh Vallishayee · Dublin, US
Larg Weiland · Hollister, US
Nobuharu Yokoyama · Tokyo, JP
Matthew Moe · Pittsburgh, US

Key dates

Filing date	Jun 29, 2019
Grant date	Apr 13, 2021
Priority date	—
Expiry date	Jun 29, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH10D84/988
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

An IC that includes a contiguous standard cell area with a 4×3 e-beam pad that is compatible with advanced manufacturing processes and an associated e-beam testable structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.