Patent assignee · KR · COMPANY

AP SYSTEMS INC.

20Patents
20Active
20Granted
55Portfolio score

Filing activity: Aug 4, 2010 → May 11, 2023

Most-cited patents

PatentTitleAreaCited byStatus
USD1034493S1 Chamber wall liner for a semiconductor manufacturing apparatus General 13 Active
US10428415B2 Method of manufacturing shadow mask using hybrid processing and shadow mask manufactured thereby Emerging Cross-Sectional Technologies 4 Active
US9318359B2 Apparatus for substrate treatment and heating apparatus Electricity 3 Active
US11450551B2 Edge ring and heat treatment apparatus having the same Electricity 2 Active
US9568372B2 Apparatus for calibrating pyrometer Physics 2 Active
US10490370B2 Emergency stop apparatus and method Electricity 2 Active
US9470581B2 Apparatus and method of detecting temperature and apparatus for processing substrate Physics 1 Active
US9386632B2 Apparatus for substrate treatment and method for operating the same Electricity 1 Active
US10680177B2 Method of manufacturing shadow mask using hybrid processing and shadow mask manufactured thereby Electricity 1 Active
US10106914B2 Apparatus for manufacturing semiconductor device and method for manufacturing semiconductor device using same Electricity 0 Active
US9431279B2 Heater block and a substrate treatment apparatus Electricity 0 Active
US9500530B2 Apparatus for calibrating pyrometer Physics 0 Active
US9117858B2 Heater block and heat treatment apparatus having the same Electricity 0 Active
US11136670B2 Gas spraying apparatus, substrate processing facility including the same, and method for processing substrate using substrate processing facility Chemistry; Metallurgy 0 Active
US8913884B2 Heater block for a rapid thermal processing apparatus Electricity 0 Active
USD1051081S1 Exhaust wall liner for semiconductor manufacturing apparatus General 0 Active
US10985040B2 Substrate treatment method and substrate treatment apparatus Physics 0 Active
US11967492B2 Thin film manufacturing apparatus Electricity 0 Active
US9400425B2 Apparatus and method for cleaning photomask Performing Operations; Transporting 0 Active
US11774370B2 Apparatus for processing substrate and method for measuring temperature of substrate Physics 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.