Patent assignee · US · COMPANY

Eugenus, Inc.

16Patents
16Active
16Granted
54Portfolio score

Filing activity: Jun 2, 2017 → Oct 17, 2023

Most-cited patents

PatentTitleAreaCited byStatus
US11482413B2 Conformal and smooth titanium nitride layers and methods of forming the same Electricity 4 Active
US11361992B2 Conformal titanium nitride-based thin films and methods of forming same Electricity 2 Active
US11832537B2 Titanium silicon nitride barrier layer Electricity 2 Active
US11401607B2 TiSiN coating method Chemistry; Metallurgy 1 Active
US11942365B2 Multi-region diffusion barrier containing titanium, silicon and nitrogen Electricity 1 Active
US12165918B2 Conformal titanium nitride-based thin films and methods of forming same Electricity 1 Active
US11587784B2 Smooth titanium nitride layers and methods of forming the same Chemistry; Metallurgy 1 Active
US12408569B2 Titanium silicon nitride barrier layer Electricity 0 Active
US12272599B2 Conformal and smooth titanium nitride layers and methods of forming the same Electricity 0 Active
US12029144B2 Encapsulation layer for chalcogenide material Electricity 0 Active
US12325914B2 Precursor delivery system and method for cyclic deposition Electricity 0 Active
US11459654B2 Liquid precursor injection for thin film deposition Electricity 0 Active
US11328944B2 Systems and methods of placing substrates in semiconductor manufacturing equipment Electricity 0 Active
US12308226B2 Conformal and smooth titanium nitride layers and methods of forming the same Electricity 0 Active
US12283486B2 Conformal and smooth titanium nitride layers and methods of forming the same Electricity 0 Active
US12431388B2 Conformal titanium silicon nitride-based thin films and methods of forming same Electricity 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.