Patent assignee · US · COMPANY

Innopad, Inc.

10Patents
10Active
10Granted
50Portfolio score

Filing activity: Jun 15, 2006 → Jan 27, 2010 · 8 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US8172648B2 Chemical-mechanical planarization pad Performing Operations; Transporting 13 Active
US8137166B2 Polishing pad having micro-grooves on the pad surface Performing Operations; Transporting 3 Active
US7985121B2 Chemical-mechanical planarization pad having end point detection window Performing Operations; Transporting 2 Active
US8430721B2 Chemical-mechanical planarization pad Performing Operations; Transporting 1 Active
US8491360B2 Three-dimensional network in CMP pad Performing Operations; Transporting 1 Active
US7534163B2 Polishing pad Chemistry; Metallurgy 1 Active
US7357704B2 Polishing pad Chemistry; Metallurgy 1 Active
US8435099B2 Chemical-mechanical planarization pad including patterned structural domains Performing Operations; Transporting 0 Active
US8546260B2 Fabric containing non-crimped fibers and methods of manufacture Textiles; Paper 0 Active
US8377351B2 Polishing pad with controlled void formation Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.