Quantum Global Technologies LLC
19Patents
10Active
19Granted
40Portfolio score
Filing activity: Feb 15, 2000 → Jan 24, 2013 · 5 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8691023B2 | Methods and apparatus for cleaning deposition chamber parts using selective spray etch | Chemistry; Metallurgy | 116 | Active |
| US6637444B1 | Volume efficient cleaning methods | Emerging Cross-Sectional Technologies | 9 | Expired |
| US6530388B1 | Volume efficient cleaning systems | Emerging Cross-Sectional Technologies | 8 | Expired |
| US6926016B1 | System for removing contaminants from semiconductor process equipment | Emerging Cross-Sectional Technologies | 7 | Expired |
| US7328712B1 | Cleaning bench for removing contaminants from semiconductor process equipment | Emerging Cross-Sectional Technologies | 6 | Expired |
| US7427330B1 | Cleaning bench for removing contaminants from semiconductor process equipment | Emerging Cross-Sectional Technologies | 5 | Active |
| US7624742B1 | Method for removing aluminum fluoride contamination from aluminum-containing surfaces of semiconductor process equipment | Chemistry; Metallurgy | 4 | Active |
| US7541094B1 | Firepolished quartz parts for use in semiconductor processing | Emerging Cross-Sectional Technologies | 3 | Active |
| US6648982B1 | Steam cleaning system and method for semiconductor process equipment | Emerging Cross-Sectional Technologies | 3 | Expired |
| US8142989B2 | Textured chamber surface | Electricity | 2 | Active |
| US8492674B2 | Methods and apparatus for ex situ seasoning of electronic device manufacturing process components | Electricity | 1 | Active |
| US6936114B1 | Steam cleaning system and method for semiconductor process equipment | Emerging Cross-Sectional Technologies | 1 | Expired |
| US8714166B2 | Method and apparatus for showerhead cleaning | Electricity | 1 | Active |
| US7267132B2 | Methods for removing silicon and silicon-nitride contamination layers from deposition tubes | Emerging Cross-Sectional Technologies | 0 | Expired |
| US8097089B2 | Methods for cleaning process kits and chambers, and for ruthenium recovery | Chemistry; Metallurgy | 0 | Active |
| US7073522B2 | Apparatus for applying disparate etching solutions to interior and exterior surfaces | Emerging Cross-Sectional Technologies | 0 | Expired |
| US7108002B1 | Steam cleaning system and method for semiconductor process equipment | Performing Operations; Transporting | 0 | Expired |
| US9068273B2 | Electrochemical removal of tantalum-containing materials | Emerging Cross-Sectional Technologies | 0 | Active |
| US8372211B2 | Method and apparatus for showerhead cleaning | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.