Aykut Aydin
11Patents
1h-index
15Co-inventors
40Inventor score
Filing activity: Sep 18, 2020 → Mar 15, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11618949B2 | Methods to reduce material surface roughness | Electricity | 1 | Active |
| US11640905B2 | Plasma enhanced deposition of silicon-containing films at low temperature | Electricity | 1 | Active |
| US12142480B2 | Seam removal in high aspect ratio gap-fill | Electricity | 0 | Active |
| US11961739B2 | Boron concentration tunability in boron-silicon films | Electricity | 0 | Active |
| US11532525B2 | Controlling concentration profiles for deposited films using machine learning | Electricity | 0 | Active |
| US12205818B2 | Boron concentration tunability in boron-silicon films | Electricity | 0 | Active |
| US11676813B2 | Doping semiconductor films | Electricity | 0 | Active |
| US11827514B2 | Amorphous silicon-based films resistant to crystallization | Chemistry; Metallurgy | 0 | Active |
| US12077852B2 | Metal-doped boron films | Electricity | 0 | Active |
| US12033848B2 | Processes for depositing sib films | Electricity | 0 | Active |
| US11939674B2 | Methods to reduce material surface roughness | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.