Chaeho Kim
12Patents
6h-index
39Co-inventors
62Inventor score
Filing activity: Jul 26, 2005 → Sep 29, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7462571B2 | Film formation method and apparatus for semiconductor process for forming a silicon nitride film | Chemistry; Metallurgy | 80 | Active |
| US7758920B2 | Method and apparatus for forming silicon-containing insulating film | Electricity | 76 | Active |
| US9536897B2 | Semiconductor device and method of fabricating the same | Electricity | 26 | Active |
| US9478561B2 | Semiconductor memory device and method of fabricating the same | Electricity | 25 | Active |
| US9130054B2 | Semiconductor memory devices and methods of fabricating the same | Electricity | 25 | Active |
| US8343594B2 | Film formation method and apparatus for semiconductor process | Chemistry; Metallurgy | 6 | Active |
| US8980731B2 | Methods of forming a semiconductor device | Electricity | 4 | Active |
| US9893082B2 | Semiconductor memory device and method of fabricating the same | Electricity | 3 | Active |
| US11532639B2 | Three-dimensional semiconductor memory device | Electricity | 1 | Active |
| US10109747B2 | Semiconductor memory devices and methods of fabricating the same | Electricity | 0 | Active |
| US7959733B2 | Film formation apparatus and method for semiconductor process | Emerging Cross-Sectional Technologies | 0 | Active |
| US10208397B2 | Apparatus for depositing a thin film | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.