Inventor · Singapore, SG

Charles Lin

19Patents
7h-index
32Co-inventors
66Inventor score

Filing activity: May 30, 1997 → Mar 8, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US6211040A Two-step, low argon, HDP CVD oxide deposition process Electricity 42 Expired
US6207554A Gap filling process in integrated circuits using low dielectric constant materials Electricity 21 Expired
US6245193A Chemical mechanical polishing apparatus improved substrate carrier head and method of use Performing Operations; Transporting 16 Expired
US6183189A Self aligning wafer chuck design for wafer processing tools Emerging Cross-Sectional Technologies 11 Expired
US6136710A Chemical mechanical polishing apparatus with improved substrate carrier head and method of use Performing Operations; Transporting 10 Expired
US5918152A Gap filling method using high pressure Electricity 9 Expired
US6653227B1 Method of cobalt silicidation using an oxide-Titanium interlayer Electricity 8 Expired
US11575305B2 Interface for passing control information over an isolation channel Electricity 7 Active
US6376378B1 Polishing apparatus and method for forming an integrated circuit Electricity 7 Expired
US6558739B1 Titanium nitride/titanium tungsten alloy composite barrier layer for integrated circuits Electricity 7 Expired
US8552797B2 High accuracy RC calibradion circuit Electricity 6 Active
US11962233B2 Interface for passing control information over an isolation channel Electricity 3 Active
US6054390A Grazing incident angle processing method for microelectronics layer fabrication Electricity 3 Expired
US6443809B1 Polishing apparatus and method for forming an integrated circuit Performing Operations; Transporting 3 Expired
US6964598B1 Polishing apparatus and method for forming an integrated circuit Electricity 1 Expired
US8023919B2 Receiver dynamically switching to pseudo differential mode for SOC spur reduction Electricity 1 Active
US12218576B2 Interface for passing control information over an isolation channel Electricity 1 Active
US7156726B1 Polishing apparatus and method for forming an integrated circuit Performing Operations; Transporting 1 Expired
US10699995B2 Isolator with symmetric multi-channel layout Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.