Inventor · Hsinchu, TW

Chia-Hsi Wang

12Patents
0h-index
10Co-inventors
41Inventor score

Filing activity: Jun 20, 2014 → Sep 22, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US12180576B2 PVD target design and semiconductor devices formed using the same Electricity 0 Active
US12359307B2 In situ and tunable deposition of a film Electricity 0 Active
US11462394B2 Physical vapor deposition apparatus and method thereof Electricity 0 Active
US11823878B2 Deposition apparatus, deposition target structure, and method Electricity 0 Active
US11725270B2 PVD target design and semiconductor devices formed using the same Electricity 0 Active
US12165898B2 Adjustable wafer chuck Electricity 0 Active
US12094698B2 Physical vapor deposition apparatus and method thereof Electricity 0 Active
US10113228B2 Method for controlling semiconductor deposition operation Electricity 0 Active
US12198927B2 Deposition system and method Electricity 0 Active
US11688591B2 Physical vapor deposition apparatus and method thereof Electricity 0 Active
US12334319B2 Physical vapor deposition (PVD) with target erosion profile monitoring Electricity 0 Active
US12237159B2 Deposition apparatus, deposition target structure, and method Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.