Inventor · Taoyuan, TW

Chia-Lin Lu

42Patents
6h-index
58Co-inventors
64Inventor score

Filing activity: May 8, 2014 → Nov 22, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US9209273B1 Method of fabricating metal gate structure Electricity 39 Active
US9543211B1 Semiconductor structure and manufacturing method thereof Electricity 11 Active
US9530851B1 Semiconductor device and manufacturing methods thereof Electricity 8 Active
US9230864B1 Method of forming a semiconductor device having a metal gate Electricity 7 Active
US9263540B1 Metal gate structure Electricity 7 Active
US9490334B2 Semiconductor device having metal gate and manufacturing method thereof Electricity 6 Active
US9698255B2 Semiconductor device having gate structure with doped hard mask Electricity 4 Active
US10109525B1 Fabrication method and structure of semiconductor device with contact and plug Electricity 4 Active
US9673100B2 Semiconductor device having contact plug in two dielectric layers and two etch stop layers Electricity 4 Active
US9640484B2 Semiconductor device and manufacturing method thereof Electricity 4 Active
US9214392B1 Method of forming contact hole and semiconductor structure with contact plug Electricity 4 Active
US9780193B2 Device with reinforced metal gate spacer and method of fabricating Electricity 4 Active
US9548239B2 Method for fabricating contact plug in an interlayer dielectric layer Electricity 3 Active
US10103250B2 Method of fabricating semiconductor device Electricity 3 Active
US9728455B2 Semiconductor device and method for fabricating the same Electricity 3 Active
US9711411B2 Semiconductor device and method for fabricating the same Electricity 3 Active
US9685531B2 Method for manufacturing semiconductor device having metal gate Electricity 2 Active
US9613969B2 Semiconductor structure and method of forming the same Electricity 2 Active
US9865593B1 Semiconductor device and fabrication method thereof Electricity 1 Active
US10268405B2 Dynamic rank switching for low power volatile memory Emerging Cross-Sectional Technologies 1 Active
US10332978B2 Device with reinforced metal gate spacer and method of fabricating Electricity 1 Active
US10916694B2 Magnetoresistive random access memory (MRAM) device Electricity 1 Active
US9748349B2 Semiconductor device Electricity 1 Active
US9985123B2 Method for fabricating a semiconductor device having gate structure with doped hard mask Electricity 1 Active
US10199374B2 Semiconductor device and fabrication method thereof Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.