Inventor

Chieh-Han Wu

15Patents
3h-index
20Co-inventors
56Inventor score

Filing activity: Dec 19, 2013 → Apr 17, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US9576814B2 Method of spacer patterning to form a target integrated circuit pattern Electricity 2,776 Active
US9184054B1 Method for integrated circuit patterning Electricity 751 Active
US9136106B2 Method for integrated circuit patterning Electricity 11 Active
US9418886B1 Method of forming conductive features Electricity 3 Active
US11251118B2 Self-aligned via structures with barrier layers Electricity 2 Active
US11631639B2 Method of fabricating self-aligned via structures Electricity 1 Active
US12165920B2 Semiconductor structure and method for forming the same Electricity 0 Active
US9418862B2 Method for integrated circuit patterning Electricity 0 Active
US9640397B2 Method of fabricating a semiconductor integrated circuit using a directed self-assembly block copolymer Electricity 0 Active
US9653349B2 Semiconductor integrated circuit with nano gap Electricity 0 Active
US12046551B2 Interconnect structure having a barrier layer along the sidewall of self-aligned via structures Electricity 0 Active
US10049919B2 Semiconductor device including a target integrated circuit pattern Electricity 0 Active
US11676862B2 Semiconductor device structure and methods of forming the same Electricity 0 Active
US11830910B2 Semiconductor structure having air gaps and method for manufacturing the same Electricity 0 Active
US11393718B2 Semiconductor structure and method for forming the same Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.