Christopher H. Raeder
15Patents
9h-index
25Co-inventors
64Inventor score
Filing activity: May 8, 1998 → Oct 24, 2005
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6540591B1 | Method and apparatus for post-polish thickness and uniformity control | Performing Operations; Transporting | 56 | Expired |
| US6276989A | Method and apparatus for controlling within-wafer uniformity in chemical mechanical polishing | Performing Operations; Transporting | 46 | Expired |
| US6284622A | Method for filling trenches | Electricity | 41 | Expired |
| US6106661A | Polishing pad having a wear level indicator and system using the same | Performing Operations; Transporting | 21 | Expired |
| US6155915A | System and method for independent air bearing zoning for semiconductor polishing device | Performing Operations; Transporting | 18 | Expired |
| US6331137A | Polishing pad having open area which varies with distance from initial pad surface | Emerging Cross-Sectional Technologies | 17 | Expired |
| US6452180B1 | Infrared inspection for determining residual films on semiconductor devices | Physics | 16 | Expired |
| US6454899B1 | Apparatus for filling trenches | Electricity | 16 | Expired |
| US6171174A | System and method for controlling a multi-arm polishing tool | Emerging Cross-Sectional Technologies | 13 | Expired |
| US6057068A | Method for determining the efficiency of a planarization process | Electricity | 7 | Expired |
| US6444564B1 | Method and product for improved use of low k dielectric material among integrated circuit interconnect structures | Electricity | 5 | Expired |
| US7008301B1 | Polishing uniformity via pad conditioning | Performing Operations; Transporting | 3 | Expired |
| US7307002B2 | Non-critical complementary masking method for poly-1 definition in flash memory device fabrication | Electricity | 3 | Expired |
| US6379216B1 | Rotary chemical-mechanical polishing apparatus employing multiple fluid-bearing platens for semiconductor fabrication | Performing Operations; Transporting | 2 | Expired |
| US7888269B2 | Triple layer anti-reflective hard mask | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.