Dorian Heimanson
15Patents
10h-index
14Co-inventors
65Inventor score
Filing activity: Jul 29, 1992 → Aug 19, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5775416A | Temperature controlled chuck for vacuum processing | Electricity | 47 | Expired |
| US5876573A | High magnetic flux cathode apparatus and method for high productivity physical-vapor deposition | Electricity | 31 | Expired |
| US6039848A | Ultra-high vacuum apparatus and method for high productivity physical vapor deposition. | Chemistry; Metallurgy | 31 | Expired |
| US6221217A | Physical vapor deposition system having reduced thickness backing plate | Electricity | 31 | Expired |
| US5746897A | High magnetic flux permanent magnet array apparatus and method for high productivity physical vapor deposition | Electricity | 30 | Expired |
| US5630916A | Magnetic orienting device for thin film deposition and method of use | Electricity | 27 | Expired |
| US5248402A | Apple-shaped magnetron for sputtering system | Electricity | 26 | Expired |
| US6774339B1 | Hermetic sealing of target/backing plate assemblies using electron beam melted indium or tin | Performing Operations; Transporting | 12 | Expired |
| US6592728B1 | Dual collimated deposition apparatus and method of use | Electricity | 12 | Expired |
| US6042707A | Multiple-coil electromagnet for magnetically orienting thin films | Electricity | 11 | Expired |
| US5950723A | Method of regulating substrate temperature in a low pressure environment | Electricity | 10 | Expired |
| US6572744B1 | Dual collimated deposition apparatus and method of use | Electricity | 8 | Expired |
| US6235164A | Low-pressure processing system for magnetic orientation of thin magnetic film | Electricity | 6 | Expired |
| US5902466A | Sputtering apparatus with magnetic orienting device for thin film deposition | Electricity | 5 | Expired |
| US6126790A | Method of magnetically orienting thin magnetic films with a multiple-coil electromagnet | Electricity | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.