Inventor · Ann Arbor, MI, US

Hao Chen

19Patents
4h-index
49Co-inventors
56Inventor score

Filing activity: Oct 24, 2008 → Oct 3, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US10957533B2 Methods for etching a structure for semiconductor applications Electricity 14 Active
US9852916B2 Single platform, multiple cycle spacer deposition and etch Electricity 6 Active
US8759814B2 Semiconductor light-emitting device and manufacturing method thereof Electricity 6 Active
US8357618B2 Frequency doubling using a photo-resist template mask Electricity 5 Active
US10692759B2 Methods for manufacturing an interconnect structure for semiconductor devices Electricity 2 Active
US11631962B2 Light source with integrated monitor photodetector and diffuser Electricity 2 Active
US10709360B2 Medical device with integrated biosensor Chemistry; Metallurgy 1 Active
US9406522B2 Single platform, multiple cycle spacer deposition and etch Electricity 1 Active
US9653253B2 Plasma-based material modification using a plasma source with magnetic confinement Electricity 1 Active
USD893088S1 Mid-filament spacer General 0 Active
US12212121B2 Bottom emitting VCSEL Electricity 0 Active
US11380536B2 Multi-step pre-clean for selective metal gap fill Electricity 0 Active
US11811197B2 Bottom emitting VCSEL Electricity 0 Active
US11830725B2 Method of cleaning a structure and method of depositing a capping layer in a structure Electricity 0 Active
US12149045B2 Light source with integrated monitor photodetector and diffuser Electricity 0 Active
US11759597B2 Device for providing therapeutic gas Human Necessities 0 Active
US10957590B2 Method for forming a layer Electricity 0 Active
US11776806B2 Multi-step pre-clean for selective metal gap fill Electricity 0 Active
US10898617B2 Medical products and methods configured for controlled release of nitric oxide Human Necessities 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.