Inventor · Hohenkirchen, DE

Herbert Palm

16Patents
8h-index
38Co-inventors
64Inventor score

Filing activity: Dec 13, 1996 → Jun 3, 2005

Most-cited inventions

PatentTitleAreaCited byStatus
US5763315A Shallow trench isolation with oxide-nitride/oxynitride liner Electricity 109 Expired
US6046487A Shallow trench isolation with oxide-nitride/oxynitride liner Electricity 90 Expired
US6777725B2 NROM memory circuit with recessed bitline Electricity 79 Expired
US6794249B2 Method for fabricating a memory cell Electricity 40 Expired
US5854140A Method of making an aluminum contact Electricity 34 Expired
US6548861B2 Memory cell, memory cell arrangement and fabrication method Electricity 34 Expired
US5747866A Application of thin crystalline Si.sub.3 N.sub.4 liners in shallow trench isolation (STI) structures Emerging Cross-Sectional Technologies 29 Expired
US6870263B1 Device interconnection Electricity 8 Expired
US6844584B2 Memory cell, memory cell configuration and fabrication method Electricity 4 Expired
US7184291B2 Semiconductor memory having charge trapping memory cells and fabrication method Electricity 4 Expired
US6601202B2 Circuit configuration with deactivatable scan path Physics 3 Expired
US6934854B2 Circuit and method for protecting electronic devices Physics 2 Expired
US6407938B2 Circuit configuration having a multi-state switching device and an energy discharge device connected to a temporary energy storage device in a third switching state of the switching device Electricity 2 Expired
US7017821B2 Individual configuration Performing Operations; Transporting 1 Expired
US6909294B2 Time recording device and a time recording method employing a semiconductor element Electricity 1 Expired
US7159786B2 Data carrier card Electricity 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.