Inventor · Seoul, KR

Jungmin Ko

48Patents
5h-index
60Co-inventors
68Inventor score

Filing activity: Apr 7, 2010 → Mar 17, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US9293568B2 Method of fin patterning Electricity 150 Active
US9543163B2 Methods for forming features in a material layer utilizing a combination of a main etching and a cyclical etching process Electricity 113 Active
US9478433B1 Cyclic spacer etching process with improved profile control Electricity 106 Active
US10026621B2 SiN spacer profile patterning Electricity 93 Active
US10398272B2 Vacuum cleaner Performing Operations; Transporting 9 Active
US10424487B2 Atomic layer etching processes Electricity 3 Active
US9721807B2 Cyclic spacer etching process with improved profile control Electricity 2 Active
US10517453B2 Dust collector and vacuum cleaner having the same Performing Operations; Transporting 2 Active
US11071426B2 Vacuum cleaner Human Necessities 2 Active
US10314448B2 Vacuum cleaner Human Necessities 1 Active
US11638512B2 Robot cleaner Human Necessities 1 Active
US10062575B2 Poly directional etch by oxidation Electricity 1 Active
US9368369B2 Methods for forming a self-aligned contact via selective lateral etch Electricity 1 Active
US10403507B2 Shaped etch profile with oxidation Electricity 1 Active
US10600639B2 SiN spacer profile patterning Electricity 1 Active
US11116373B2 Cleaner Human Necessities 1 Active
US10629473B2 Footing removal for nitride spacer Electricity 1 Active
US11257794B2 Semiconductor package and method of manufacturing the same Electricity 1 Active
US8236188B2 Method for low-K dielectric etch with reduced damage Electricity 1 Active
US9520302B2 Methods for controlling Fin recess loading Electricity 1 Active
US10299645B2 Vacuum cleaner Performing Operations; Transporting 1 Active
US11311162B2 Vacuum cleaner Human Necessities 0 Active
US10271701B2 Dust collector and vacuum cleaner having the same Performing Operations; Transporting 0 Active
US11869751B2 Upper electrode and substrate processing apparatus including the same Electricity 0 Active
US11658160B2 Semiconductor package and method of manufacturing the same Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.