Junichi Kai
31Patents
15h-index
33Co-inventors
81Inventor score
Filing activity: Sep 27, 1982 → Sep 11, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5260579A | Charged particle beam exposure system and charged particle beam exposure method | Electricity | 132 | Expired |
| US5369282A | Electron beam exposure method and system for exposing a pattern on a substrate with an improved accuracy and throughput | Electricity | 77 | Expired |
| US6064807A | Charged-particle beam exposure system and method | Electricity | 67 | Expired |
| US5841145A | Method of and system for exposing pattern on object by charged particle beam | Electricity | 43 | Expired |
| US5399872A | Charged-particle beam exposure method | Electricity | 34 | Expired |
| US4980567A | Charged particle beam exposure system using line beams | Electricity | 29 | Expired |
| US5528048A | Charged particle beam exposure system and method | Electricity | 26 | Expired |
| US5614725A | Charged particle beam exposure system and method | Electricity | 23 | Expired |
| US5329130A | Charged particle beam exposure method and apparatus | Electricity | 23 | Expired |
| US4586141A | Method and apparatus for an electron beam exposure system | Electricity | 23 | Expired |
| US6646275B2 | Charged particle beam exposure system and method | Electricity | 22 | Expired |
| US5866300A | Method of and system for exposing pattern on object by charged particle beam | Emerging Cross-Sectional Technologies | 20 | Expired |
| US5977548A | Charged particle beam exposure system and method | Electricity | 17 | Expired |
| US6118129A | Method and system for exposing an exposure pattern on an object by a charged particle beam which is shaped into a plurality of beam elements | Electricity | 16 | Expired |
| US4950910A | Electron beam exposure method and apparatus | Electricity | 15 | Expired |
| US5334846A | Correction of charged particle beam exposure deflection by detecting stage position and a position detection mark | Electricity | 14 | Expired |
| US5719402A | Method of and system for charged particle beam exposure | Electricity | 12 | Expired |
| US6486479B1 | Charged particle beam exposure system and method | Electricity | 12 | Expired |
| US5920077A | Charged particle beam exposure system | Electricity | 10 | Expired |
| US5134300A | Method and apparatus for controlling charged particle beams in charged particle beam exposure system | Electricity | 10 | Expired |
| US5546319A | Method of and system for charged particle beam exposure | Electricity | 9 | Expired |
| US5610406A | Charged particle beam exposure method and apparatus | Electricity | 8 | Expired |
| US5444257A | Electron-beam exposure system for reduced distortion of electron beam spot | Electricity | 8 | Expired |
| US5225684A | Charged particle beam exposure apparatus control system and a method of operation for providing a drawing start signal | Electricity | 8 | Expired |
| US6057907A | Method of and system for exposing pattern on object by charged particle beam | Emerging Cross-Sectional Technologies | 7 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.