Junichiro Iba
12Patents
7h-index
15Co-inventors
55Inventor score
Filing activity: Oct 12, 1995 → Jun 21, 2000
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5883006A | Method for making a semiconductor device using a flowable oxide film | Electricity | 58 | Expired |
| US6011611A | Method of measuring aberration of projection optics | Physics | 47 | Expired |
| US6100132A | Method of deforming a trench by a thermal treatment | Emerging Cross-Sectional Technologies | 36 | Expired |
| US6288556A | Method of electrical measurement of misregistration of patterns | Electricity | 17 | Expired |
| US6107135A | Method of making a semiconductor memory device having a buried plate electrode | Electricity | 17 | Expired |
| US6600189B1 | Semiconductor device and semiconductor device manufacturing method | Emerging Cross-Sectional Technologies | 11 | Expired |
| US5715040A | Illumination aperture of low intensity loss | Physics | 9 | Expired |
| US6100130A | Method of manufacturing a semiconductor memory device having a trench capacitor | Electricity | 7 | Expired |
| US6534814B2 | Method of manufacturing a semiconductor memory device having a trench capacitor with sufficient capacitance and small junction leak current | Electricity | 6 | Expired |
| US6440644B1 | Planarization method and system using variable exposure | Physics | 4 | Expired |
| US6064466A | Planarization method and system using variable exposure | Electricity | 3 | Expired |
| US6313535A | Wiring layer of a semiconductor integrated circuit | Electricity | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.