Kazumi Kubo
16Patents
4h-index
18Co-inventors
57Inventor score
Filing activity: May 15, 1991 → Sep 28, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6953731B2 | Fabrication process of a semiconductor device | Electricity | 9 | Expired |
| US5703900A | Laser-diode-pumped solid state laser and method of manufacturing the same | Electricity | 7 | Expired |
| US6907059B1 | Optical component fixing method and optical component support | Emerging Cross-Sectional Technologies | 5 | Expired |
| US7696106B2 | Film formation method and apparatus for semiconductor process | Electricity | 4 | Active |
| US5310918A | 1-aryl-substituted azole, non-linear optical material and novel molecular crystal containing same and method and module for the conversion of light wavelength using same | Physics | 3 | Expired |
| US7105362B2 | Method of forming dielectric film | Electricity | 3 | Expired |
| US7637268B2 | Film formation method and apparatus for semiconductor process | Chemistry; Metallurgy | 0 | Active |
| US11075074B2 | Method for depositing a silicon nitride film and film deposition apparatus | Electricity | 0 | Active |
| US12371785B2 | Method for forming film on substrate surface having convex portion | Chemistry; Metallurgy | 0 | Active |
| US10748758B2 | Method for depositing a silicon nitride film and film deposition apparatus | Electricity | 0 | Active |
| US10643837B2 | Method for depositing a silicon nitride film and film deposition apparatus | Electricity | 0 | Active |
| US11404265B2 | Film deposition method | Electricity | 0 | Active |
| US10636648B2 | Film deposition method of depositing film and film deposition apparatus | Electricity | 0 | Active |
| US11170999B2 | Deposition method | Electricity | 0 | Active |
| US8518834B2 | Method and apparatus for forming oxide film on carbon film | Chemistry; Metallurgy | 0 | Active |
| US11952661B2 | Deposition method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.