Inventor · Tokyo, JP

Kenya Ito

88Patents
13h-index
115Co-inventors
87Inventor score

Filing activity: Mar 5, 1997 → May 15, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
USD777546S1 Work holder for polishing apparatus General 391 Active
US6183893A Perpendicular magnetic recording medium and magnetic storage apparatus using the same Emerging Cross-Sectional Technologies 57 Expired
US6036582A Polishing apparatus Performing Operations; Transporting 40 Expired
US5923485A Storage device for reliably maintaining data in a reproducible state for a long period of time Physics 28 Expired
US6578891B1 Substrate holder and substrate transfer apparatus using the same Emerging Cross-Sectional Technologies 25 Expired
US7055535B2 Holding unit, processing apparatus and holding method of substrates Emerging Cross-Sectional Technologies 23 Expired
US6447936B1 Magnetic recording medium and magnetic recording apparatus using the same Emerging Cross-Sectional Technologies 22 Expired
US6716516B2 Magnetic recording medium and magnetic recording apparatus using the same Emerging Cross-Sectional Technologies 21 Expired
US7682225B2 Polishing apparatus and substrate processing apparatus Performing Operations; Transporting 19 Active
US6494220B1 Apparatus for cleaning a substrate such as a semiconductor wafer Emerging Cross-Sectional Technologies 16 Expired
US6543080B1 Apparatus and method for cleaning semiconductor substrate Performing Operations; Transporting 14 Expired
US6248009A Apparatus for cleaning substrate Electricity 14 Expired
US6403203B2 Magnetic recording medium and magnetic recording apparatus using the same Emerging Cross-Sectional Technologies 13 Expired
US6092542A Cleaning apparatus Emerging Cross-Sectional Technologies 12 Expired
US7373060B2 Optical waveguide using polymer composed of silsesquioxane derivative Physics 12 Expired
US6308361A Cleaning apparatus Electricity 12 Expired
US7053167B2 Silsesquioxane derivative having functional group Chemistry; Metallurgy 12 Expired
US6932884B2 Substrate processing apparatus Electricity 12 Expired
US7868112B2 Fluorine-containing polymer and resin composition Chemistry; Metallurgy 11 Active
US7744445B2 Polishing apparatus and polishing method Performing Operations; Transporting 11 Active
US6084729A Storage device for reliably maintaining data in a reproducible state for a long period of time Physics 10 Expired
US6083599A Perpendicular magnetic recording media and magnetic recording and reproducing apparatus using the same Emerging Cross-Sectional Technologies 9 Expired
US7578886B2 Substrate processing apparatus, substrate processing method, and substrate holding apparatus Performing Operations; Transporting 8 Expired
US6141812A Cleaning apparatus and cleaning member rinsing apparatus Electricity 8 Expired
US6116994A Polishing apparatus Performing Operations; Transporting 7 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.