Kristian E. Johnsgard
15Patents
12h-index
17Co-inventors
71Inventor score
Filing activity: Feb 25, 1992 → Apr 10, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5830277A | Thermal processing system with supplemental resistive heater and shielded optical pyrometry | Electricity | 107 | Expired |
| US6172337A | System and method for thermal processing of a semiconductor substrate | Chemistry; Metallurgy | 107 | Expired |
| US5324684A | Gas phase doping of semiconductor material in a cold-wall radiantly heated reactor under reduced pressure | Emerging Cross-Sectional Technologies | 80 | Expired |
| US6200634A | Thermal processing system with supplemental resistive heater and shielded optical pyrometry | Electricity | 80 | Expired |
| US5493987A | Chemical vapor deposition reactor and method | Electricity | 65 | Expired |
| US6342691B1 | Apparatus and method for thermal processing of semiconductor substrates | Chemistry; Metallurgy | 54 | Expired |
| US6301434A | Apparatus and method for CVD and thermal processing of semiconductor substrates | Chemistry; Metallurgy | 52 | Expired |
| US6002109A | System and method for thermal processing of a semiconductor substrate | Chemistry; Metallurgy | 52 | Expired |
| US6403925B1 | System and method for thermal processing of a semiconductor substrate | Chemistry; Metallurgy | 22 | Expired |
| US6046439A | System and method for thermal processing of a semiconductor substrate | Electricity | 22 | Expired |
| US6436796B1 | Systems and methods for epitaxial processing of a semiconductor substrate | Chemistry; Metallurgy | 20 | Expired |
| US6902622B2 | Systems and methods for epitaxially depositing films on a semiconductor substrate | Electricity | 19 | Expired |
| US6399921B1 | System and method for thermal processing of a semiconductor substrate | Electricity | 10 | Expired |
| US6043460A | System and method for thermal processing of a semiconductor substrate | Chemistry; Metallurgy | 9 | Expired |
| US7176417B2 | Apparatuses and methods for resistively heating a thermal processing system | Electricity | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.