Inventor · Minxiong, TW

Li-Lin Su

20Patents
4h-index
21Co-inventors
59Inventor score

Filing activity: Aug 3, 2004 → Jul 19, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US7704886B2 Multi-step Cu seed layer formation for improving sidewall coverage Electricity 12 Active
US9530737B1 Semiconductor device and manufacturing method thereof Electricity 10 Active
US7253501B2 High performance metallization cap layer Electricity 8 Expired
US9614052B2 Copper contact plugs with barrier layers Electricity 6 Active
US8252690B2 In situ Cu seed layer formation for improving sidewall coverage Electricity 3 Active
US9136206B2 Copper contact plugs with barrier layers Electricity 3 Active
US11088020B2 Structure and formation method of interconnection structure of semiconductor device Electricity 3 Active
US10534273B2 Multi-metal fill with self-aligned patterning and dielectric with voids Electricity 2 Active
US9721894B2 Semiconductor device and manufacturing method thereof Electricity 2 Active
US7453149B2 Composite barrier layer Emerging Cross-Sectional Technologies 1 Expired
US9589897B1 Trench liner for removing impurities in a non-copper trench Electricity 1 Active
US8034709B2 Method for forming composite barrier layer Emerging Cross-Sectional Technologies 0 Active
US12062611B2 Integrated circuit interconnect structures with air gaps Electricity 0 Active
US11244898B2 Integrated circuit interconnect structures with air gaps Electricity 0 Active
US11127680B2 Semiconductor device and manufacturing method thereof Electricity 0 Active
US11860550B2 Multi-metal fill with self-aligned patterning and dielectric with voids Electricity 0 Active
US9935006B2 Trench liner for removing impurities in a non-copper trench Electricity 0 Active
US11251131B2 Copper contact plugs with barrier layers Electricity 0 Active
US11422475B2 Multi-metal fill with self-aligned patterning and dielectric with voids Electricity 0 Active
US10700010B2 Copper contact plugs with barrier layers Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.