Inventor · Pingtung City, TW

Lu Chen

17Patents

2h-index

27Co-inventors

54Inventor score

Filing activity: Apr 2, 1987 → Dec 22, 2022

Most-cited inventions

Patent	Title	Area	Cited by	Status
US8778783B2	Methods for improved growth of group III nitride buffer layers	Electricity	3	Active
US4748878A	Impact socket wrench or an attachment assembly with hammering effect	Emerging Cross-Sectional Technologies	3	Expired
US11955382B2	Reverse selective etch stop layer	Electricity	0	Active
US12431358B2	Methods and materials for enhanced barrier performance and reduced via resistance	Electricity	0	Active
US12243774B2	Impurity removal in doped ALD tantalum nitride	Electricity	0	Active
US11784127B2	Ruthenium liner and cap for back-end-of-line	Electricity	0	Active
US11270911B2	Doping of metal barrier layers	Electricity	0	Active
US11764157B2	Ruthenium liner and cap for back-end-of-line applications	Electricity	0	Active
US12195845B2	Conditioning treatment for ALD productivity	Electricity	0	Active
US8853086B2	Methods for pretreatment of group III-nitride depositions	Electricity	0	Active
US8980002B2	Methods for improved growth of group III nitride semiconductor compounds	Chemistry; Metallurgy	0	Active
US11410881B2	Impurity removal in doped ALD tantalum nitride	Electricity	0	Active
US9303318B2	Multiple complementary gas distribution assemblies	Emerging Cross-Sectional Technologies	0	Active
US12211743B2	Method of forming a metal liner for interconnect structures	Electricity	0	Active
US8882870B2	Coated tool	Emerging Cross-Sectional Technologies	0	Active
US12148660B2	Low resistance and high reliability metallization module	Electricity	0	Active
US11566324B2	Conditioning treatment for ALD productivity	Electricity	0	Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.