Inventor · Dresden, DE

Marco Lepper

8Patents
2h-index
17Co-inventors
40Inventor score

Filing activity: Nov 13, 2007 → Dec 14, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US8293605B2 Methods for fabricating a CMOS integrated circuit having a dual stress layer (DSL) Electricity 2 Active
US7785935B2 Manufacturing method for forming an integrated circuit device and corresponding integrated circuit device Electricity 2 Active
US9023696B2 Method of forming contacts for devices with multiple stress liners Electricity 2 Active
US9023709B2 Top corner rounding by implant-enhanced wet etching Electricity 1 Active
US9590056B2 Semiconductor device comprising contact structures with protection layers formed on sidewalls of contact etch stop layers Electricity 1 Active
US9269809B2 Methods for forming protection layers on sidewalls of contact etch stop layers Electricity 0 Active
US8883586B2 Mol insitu Pt rework sequence Electricity 0 Active
US8673696B2 SOI semiconductor device comprising a substrate diode with reduced metal silicide leakage Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.