Inventor · Toyama, JP

Masahito Kitamura

10Patents
1h-index
17Co-inventors
47Inventor score

Filing activity: Jun 24, 2010 → Jan 30, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US9024284B2 Superlattice phase change memory including Sb2Te3 layers containing Zr Electricity 4 Active
US9735007B2 Method of processing substrate, substrate processing apparatus, and recording medium Electricity 1 Active
US10584419B2 Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Electricity 1 Active
US8685866B2 Method of manufacturing semiconductor device and substrate processing apparatus Electricity 1 Active
US9761456B2 Method of manufacturing semiconductor device and substrate processing apparatus Chemistry; Metallurgy 0 Active
US9368358B2 Method of manufacturing a semiconductor device Electricity 0 Active
US11047048B2 Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Electricity 0 Active
US11075114B2 Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Electricity 0 Active
US10388762B2 Method of manufacturing semiconductor device Electricity 0 Active
US10355098B2 Method of manufacturing semiconductor device Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.