Michael A. Leach
23Patents
16h-index
23Co-inventors
81Inventor score
Filing activity: Apr 27, 1987 → Feb 22, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4793895A | In situ conductivity monitoring technique for chemical/mechanical planarization endpoint detection | Physics | 273 | Expired |
| US4838991A | Process for defining organic sidewall structures | Emerging Cross-Sectional Technologies | 234 | Expired |
| US4910155A | Wafer flood polishing | Performing Operations; Transporting | 180 | Expired |
| US4956313A | Via-filling and planarization technique | Electricity | 162 | Expired |
| US4934102A | System for mechanical planarization | Performing Operations; Transporting | 109 | Expired |
| US5213655A | Device and method for detecting an end point in polishing operation | Physics | 83 | Expired |
| US5356513A | Polishstop planarization method and structure | Electricity | 72 | Expired |
| US4776087A | VLSI coaxial wiring structure | Emerging Cross-Sectional Technologies | 65 | Expired |
| US5607341A | Method and structure for polishing a wafer during manufacture of integrated circuits | Performing Operations; Transporting | 59 | Expired |
| US5242524A | Device for detecting an end point in polishing operations | Physics | 55 | Expired |
| US5760475A | Refractory metal-titanium nitride conductive structures | Emerging Cross-Sectional Technologies | 48 | Expired |
| US5132617A | Method of measuring changes in impedance of a variable impedance load by disposing an impedance connected coil within the air gap of a magnetic core | Physics | 48 | Expired |
| US5510652A | Polishstop planarization structure | Electricity | 46 | Expired |
| US5836807A | Method and structure for polishing a wafer during manufacture of integrated circuits | Performing Operations; Transporting | 37 | Expired |
| US5733175A | Polishing a workpiece using equal velocity at all points overlapping a polisher | Performing Operations; Transporting | 32 | Expired |
| US6267655A | Retaining ring for wafer polishing | Performing Operations; Transporting | 26 | Expired |
| US5136124A | Method of forming conductors within an insulating substrate | Electricity | 16 | Expired |
| US4985990A | Method of forming conductors within an insulating substrate | Emerging Cross-Sectional Technologies | 16 | Expired |
| US5702290A | Block for polishing a wafer during manufacture of integrated circuits | Performing Operations; Transporting | 14 | Expired |
| USRE38029E1 | Wafer polishing and endpoint detection | General | 4 | Expired |
| US9848534B1 | Agricultural harvesting unit and method of harvesting using the unit | Human Necessities | 1 | Active |
| US10130032B2 | Volume extending assembly for combine storage tank | Human Necessities | 0 | Active |
| US10426085B2 | Centrifugal fan rotor and apparatus incorporating the centrifugal fan rotor | Mechanical Engineering; Lighting; Heating | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.