Inventor · Hachioji, JP

Naoshi Itabashi

28Patents
6h-index
62Co-inventors
72Inventor score

Filing activity: Oct 13, 1995 → Oct 7, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US6033481A Plasma processing apparatus Electricity 27 Expired
US5891252A Plasma processing apparatus Electricity 25 Expired
US5714757A Surface analyzing method and its apparatus Electricity 18 Expired
US7396771B2 Plasma etching apparatus and plasma etching method Electricity 8 Active
US7601241B2 Plasma processing apparatus and plasma processing method Chemistry; Metallurgy 7 Expired
US8546266B2 Plasma processing method and plasma processing apparatus Electricity 6 Active
US6673685B2 Method of manufacturing semiconductor devices Electricity 5 Expired
US8129283B2 Plasma processing method and plasma processing apparatus Electricity 5 Active
US7931776B2 Plasma processing apparatus Electricity 3 Active
US7908104B2 Plasma processing apparatus and method for detecting status of said apparatus Electricity 3 Active
US8926790B2 Plasma processing apparatus Electricity 3 Active
US9076637B2 Plasma processing method and plasma processing apparatus Electricity 2 Active
US9702695B2 Image processing device, charged particle beam device, charged particle beam device adjustment sample, and manufacturing method thereof Emerging Cross-Sectional Technologies 2 Active
US9034270B2 Plasma sterilization and cleaning treatment device for escalator, and escalator using the same Human Necessities 2 Active
US9997337B2 Plasma processing method and plasma processing apparatus Electricity 1 Active
US7604709B2 Plasma processing apparatus Electricity 1 Expired
US7442651B2 Plasma etching method Electricity 1 Expired
US7771607B2 Plasma processing apparatus and plasma processing method Chemistry; Metallurgy 1 Active
US6797112B2 Plasma treatment apparatus and method of producing semiconductor device using the apparatus Electricity 1 Expired
US8282767B2 Plasma processing apparatus Electricity 1 Active
US10481125B2 Biomolecule measuring device Physics 0 Active
US9759681B2 Biomolecule detection method, biomolecule detection device and analysis device Physics 0 Active
US10031083B2 Fixed position controller and method Physics 0 Active
US8865403B2 Nucleic acid analyzing device and nucleic acid analyzer Physics 0 Active
US11181502B2 Hole formation method and measurement device Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.