Inventor · Fremont, CA, US

Ramesh Gopalan

14Patents

2h-index

25Co-inventors

54Inventor score

Filing activity: Jun 28, 2002 → May 25, 2022

Most-cited inventions

Patent	Title	Area	Cited by	Status
US11114326B2	Substrate chucking and dechucking methods	Electricity	2	Active
US7413988B1	Method and apparatus for detecting planarization of metal films prior to clearing	Electricity	2	Expired
US10685819B2	Measuring concentrations of radicals in semiconductor processing	Physics	2	Active
US11373890B2	Wireless in-situ real-time measurement of electrostatic chucking force in semiconductor wafer processing	Electricity	1	Active
US12033875B2	Wireless in-situ real-time measurement of electrostatic chucking force in semiconductor wafer processing	Electricity	0	Active
US11047035B2	Protective yttria coating for semiconductor equipment parts	Electricity	0	Active
US11521839B2	Inline measurement of process gas dissociation using infrared absorption	Electricity	0	Active
US10415251B1	Skylight with compound parabolic diffusers	Fixed Constructions	0	Active
US7690966B1	Method and apparatus for detecting planarization of metal films prior to clearing	Electricity	0	Active
US10094788B2	Surface acoustic wave sensors in semiconductor processing equipment	Electricity	0	Active
US7040952B1	Method for reducing or eliminating de-lamination of semiconductor wafer film layers during a chemical mechanical planarization process	Performing Operations; Transporting	0	Expired
US10513008B2	Chemical mechanical polishing smart ring	Electricity	0	Active
US10656100B2	Surface acoustic wave sensors in semiconductor processing equipment	Electricity	0	Active
US11355325B2	Methods and systems for monitoring input power for process control in semiconductor process systems	Electricity	0	Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.