Robert Kerprich
12Patents
6h-index
12Co-inventors
59Inventor score
Filing activity: Mar 23, 1999 → Apr 5, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9017140B2 | CMP pad with local area transparency | Performing Operations; Transporting | 35 | Active |
| US9156124B2 | Soft polishing pad for polishing a semiconductor substrate | Performing Operations; Transporting | 35 | Active |
| US9296085B2 | Polishing pad with homogeneous body having discrete protrusions thereon | Performing Operations; Transporting | 30 | Active |
| US8968058B2 | Polishing pad with alignment feature | Chemistry; Metallurgy | 18 | Active |
| US9180570B2 | Grooved CMP pad | Performing Operations; Transporting | 11 | Active |
| US9649742B2 | Polishing pad having polishing surface with continuous protrusions | Performing Operations; Transporting | 9 | Active |
| US10160092B2 | Polishing pad having polishing surface with continuous protrusions having tapered sidewalls | Performing Operations; Transporting | 3 | Active |
| US6272908A | Flexural probe and method for examining a moving sensitive web surface | Physics | 3 | Expired |
| US9375823B2 | Grooved CMP pads | Performing Operations; Transporting | 1 | Active |
| US9249273B2 | Polishing pad with alignment feature | Chemistry; Metallurgy | 0 | Active |
| US10946495B2 | Low density polishing pad | Chemistry; Metallurgy | 0 | Active |
| US10293459B2 | Polishing pad having polishing surface with continuous protrusions | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.