Scott E. Moore
164Patents
30h-index
32Co-inventors
90Inventor score
Filing activity: Nov 21, 1988 → May 3, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6714121B1 | RFID material tracking method and apparatus | Physics | 273 | Expired |
| US6139402A | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates | Performing Operations; Transporting | 138 | Expired |
| US6352466B1 | Method and apparatus for wireless transfer of chemical-mechanical planarization measurements | Electricity | 129 | Expired |
| US6234878A | Endpoint detection apparatus, planarizing machines with endpointing apparatus, and endpointing methods for mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Performing Operations; Transporting | 129 | Expired |
| US6206754A | Endpoint detection apparatus, planarizing machines with endpointing apparatus, and endpointing methods for mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Performing Operations; Transporting | 117 | Expired |
| US6187681A | Method and apparatus for planarization of a substrate | Electricity | 109 | Expired |
| US6261163A | Web-format planarizing machines and methods for planarizing microelectronic substrate assemblies | Performing Operations; Transporting | 108 | Expired |
| US5954912A | Rotary coupling | Electricity | 107 | Expired |
| US6312558A | Method and apparatus for planarization of a substrate | Electricity | 107 | Expired |
| US6306014A | Web-format planarizing machines and methods for planarizing microelectronic substrate assemblies | Performing Operations; Transporting | 104 | Expired |
| US6306008A | Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization | Performing Operations; Transporting | 99 | Expired |
| US5747386A | Rotary coupling | Electricity | 98 | Expired |
| US6354930B1 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates | Performing Operations; Transporting | 94 | Expired |
| US5833519A | Method and apparatus for mechanical polishing | Performing Operations; Transporting | 93 | Expired |
| US6193588A | Method and apparatus for planarizing and cleaning microelectronic substrates | Performing Operations; Transporting | 93 | Expired |
| US6196899A | Polishing apparatus | Performing Operations; Transporting | 92 | Expired |
| US6273796A | Method and apparatus for planarizing a microelectronic substrate with a tilted planarizing surface | Performing Operations; Transporting | 91 | Expired |
| US6364757B2 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates | Performing Operations; Transporting | 85 | Expired |
| US6368193B1 | Method and apparatus for planarizing and cleaning microelectronic substrates | Performing Operations; Transporting | 82 | Expired |
| US6152808A | Microelectronic substrate polishing systems, semiconductor wafer polishing systems, methods of polishing microelectronic substrates, and methods of polishing wafers | Performing Operations; Transporting | 80 | Expired |
| US6447369B1 | Planarizing machines and alignment systems for mechanical and/or chemical-mechanical planarization of microelectronic substrates | Performing Operations; Transporting | 79 | Expired |
| US6358127B1 | Method and apparatus for planarizing and cleaning microelectronic substrates | Performing Operations; Transporting | 78 | Expired |
| US6956538B2 | RFID material tracking method and apparatus | Physics | 76 | Expired |
| US6609947B1 | Planarizing machines and control systems for mechanical and/or chemical-mechanical planarization of micro electronic substrates | Performing Operations; Transporting | 75 | Expired |
| US7042358B2 | RFID material tracking method and apparatus | Physics | 72 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.