Sheng-Hung Tu
8Patents
3h-index
18Co-inventors
46Inventor score
Filing activity: Dec 27, 2012 → Sep 6, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9546321B2 | Compositions and methods for selectively etching titanium nitride | Electricity | 4 | Active |
| US10428271B2 | Compositions and methods for selectively etching titanium nitride | Electricity | 3 | Active |
| US10472567B2 | Compositions and methods for selectively etching titanium nitride | Electricity | 3 | Active |
| US10392560B2 | Compositions and methods for selectively etching titanium nitride | Electricity | 2 | Active |
| US10651045B2 | Compositions and methods for etching silicon nitride-containing substrates | Electricity | 2 | Active |
| US9765288B2 | Compositions for cleaning III-V semiconductor materials and methods of using same | Chemistry; Metallurgy | 0 | Active |
| US10340150B2 | Ni:NiGe:Ge selective etch formulations and method of using same | Electricity | 0 | Active |
| US10790187B2 | Post-etch residue removal for advanced node beol processing | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.