Inventor · Palo Alto, CA, US

Somit Talwar

34Patents
21h-index
17Co-inventors
78Inventor score

Filing activity: Jan 29, 1997 → Nov 3, 2006

Most-cited inventions

PatentTitleAreaCited byStatus
US6479821B1 Thermally induced phase switch for laser thermal processing Physics 273 Expired
US6635588B1 Method for laser thermal processing using thermally induced reflectivity switch Electricity 265 Expired
US6747245B2 Laser scanning apparatus and methods for thermal processing Electricity 106 Expired
US5908307A Fabrication method for reduced-dimension FET devices Emerging Cross-Sectional Technologies 94 Expired
US6365476B1 Laser thermal process for fabricating field-effect transistors Electricity 93 Expired
US5888888A Method for forming a silicide region on a silicon body Electricity 85 Expired
US6274488A Method of forming a silicide region in a Si substrate and a device having same Electricity 63 Expired
US7154066B2 Laser scanning apparatus and methods for thermal processing Performing Operations; Transporting 62 Expired
US5956603A Gas immersion laser annealing method suitable for use in the fabrication of reduced-dimension integrated circuits Emerging Cross-Sectional Technologies 51 Expired
US6383956B2 Method of forming thermally induced reflectivity switch for laser thermal processing Electricity 45 Expired
US6380044B1 High-speed semiconductor transistor and selective absorption process forming same Electricity 44 Expired
US6303476A Thermally induced reflectivity switch for laser thermal processing Electricity 40 Expired
US7098155B2 Laser thermal annealing of lightly doped silicon substrates Performing Operations; Transporting 36 Expired
US7763828B2 Laser thermal processing with laser diode radiation Performing Operations; Transporting 31 Expired
US6300208A Methods for annealing an integrated device using a radiant energy absorber layer Electricity 31 Expired
US6645838B1 Selective absorption process for forming an activated doped region in a semiconductor Electricity 30 Expired
US6570656B1 Illumination fluence regulation system and method for use in thermal processing employed in the fabrication of reduced-dimension integrated circuits Performing Operations; Transporting 29 Expired
US6495390B2 Thermally induced reflectivity switch for laser thermal processing Electricity 26 Expired
US6777317B2 Method for semiconductor gate doping Electricity 24 Expired
US6420264B1 Method of forming a silicide region in a Si substrate and a device having same Electricity 22 Expired
US6297135A Method for forming silicide regions on an integrated device Electricity 21 Expired
US6825101B1 Methods for annealing a substrate and article produced by such methods Electricity 20 Expired
US7148159B2 Laser thermal annealing of lightly doped silicon substrates Performing Operations; Transporting 19 Expired
US6387803B2 Method for forming a silicide region on a silicon body Electricity 19 Expired
US7157660B2 Laser scanning apparatus and methods for thermal processing Electricity 18 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.