Inventor · Chandler, AZ, US

Wayne M. Paulson

12Patents
11h-index
26Co-inventors
72Inventor score

Filing activity: Jun 30, 1981 → Sep 16, 2003

Most-cited inventions

PatentTitleAreaCited byStatus
US5861347A Method for forming a high voltage gate dielectric for use in integrated circuit Emerging Cross-Sectional Technologies 136 Expired
US4997790A Process for forming a self-aligned contact structure Emerging Cross-Sectional Technologies 92 Expired
US5918147A Process for forming a semiconductor device with an antireflective layer Electricity 58 Expired
US5037777A Method for forming a multi-layer semiconductor device using selective planarization Emerging Cross-Sectional Technologies 51 Expired
US4956314A Differential etching of silicon nitride Electricity 41 Expired
US6218200A Multi-layer registration control for photolithography processes Electricity 39 Expired
US4392992A Chromium-silicon-nitrogen resistor material Emerging Cross-Sectional Technologies 34 Expired
US6958265B2 Semiconductor device with nanoclusters Electricity 28 Expired
US4510178A Thin film resistor material and method Emerging Cross-Sectional Technologies 26 Expired
US4591821A Chromium-silicon-nitrogen thin film resistor and apparatus Electricity 22 Expired
US5665620A Method for forming concurrent top oxides using reoxidized silicon in an EPROM Electricity 14 Expired
US4717588A Metal redistribution by rapid thermal processing Emerging Cross-Sectional Technologies 6 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.