Wayne M. Paulson
12Patents
11h-index
26Co-inventors
72Inventor score
Filing activity: Jun 30, 1981 → Sep 16, 2003
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5861347A | Method for forming a high voltage gate dielectric for use in integrated circuit | Emerging Cross-Sectional Technologies | 136 | Expired |
| US4997790A | Process for forming a self-aligned contact structure | Emerging Cross-Sectional Technologies | 92 | Expired |
| US5918147A | Process for forming a semiconductor device with an antireflective layer | Electricity | 58 | Expired |
| US5037777A | Method for forming a multi-layer semiconductor device using selective planarization | Emerging Cross-Sectional Technologies | 51 | Expired |
| US4956314A | Differential etching of silicon nitride | Electricity | 41 | Expired |
| US6218200A | Multi-layer registration control for photolithography processes | Electricity | 39 | Expired |
| US4392992A | Chromium-silicon-nitrogen resistor material | Emerging Cross-Sectional Technologies | 34 | Expired |
| US6958265B2 | Semiconductor device with nanoclusters | Electricity | 28 | Expired |
| US4510178A | Thin film resistor material and method | Emerging Cross-Sectional Technologies | 26 | Expired |
| US4591821A | Chromium-silicon-nitrogen thin film resistor and apparatus | Electricity | 22 | Expired |
| US5665620A | Method for forming concurrent top oxides using reoxidized silicon in an EPROM | Electricity | 14 | Expired |
| US4717588A | Metal redistribution by rapid thermal processing | Emerging Cross-Sectional Technologies | 6 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.